Contact Person
Prof. Dr. Johann Peter Reithmaier
Short organisation description
The University of Kassel, Germany, has founded in 1997 a new interdisciplinary Institute of Microstructure Technology and Analysis (IMA) with new facilities combining a chair in physics and one in electrical engineering. In 2005, the institute has changed the name to Institute of Nanostructure Technologies and Analysis (INA). The INA has about 400 m2 clean room and more than 2000 m2 laboratory and office space. The institute has a large variety of semiconductor process technology for silicon and III/V materials including different etching systems (RIE, ICP-RIE, CAIBE) and deposition systems (thermal and electron beam evaporators, IBD and PECVD) for metal and dielectric coatings. For nanoscale surface characterization SEM, AFM and SNOM are available. Thin film coatings can be precisely measured by an ellipsometry system. At the institute there are three MBE system dedicated to III-V epitaxy and an electron beam writing system installed. A new high resolution e-beam writing system is in operation since end of 2006. A dual beam focused ion beam system for nanostructuring and high resolution characterization will be installed beginning of 2008.

The group of Technological Physics is lead by Prof. Johann Peter Reithmaier since May 2005. Research Activities: A main research topic is to develop and explore new semiconductor nanostructure fabrication technologies, which include high resolution lithography based etch processes as well as self-organized growth of nanostructures. A major focus is also on the application of such nanostructures in nanophotonic and optoelectronic devices, this includes, e.g., quantum dot lasers and optical amplifiers for telecom applications, quantum dot high power lasers as well as single photon emitters for future quantum information applications. The group is currently involved in four European projects (TASNANO, PRONANO, WWW_BRIGHTER_EU, QPhoton). The project QPhoton is currently coordinated by UKAS. The group leader was previously also responsible for previous EU projects like Ultrabright and BigBand. Especially in the BigBand project, new record values in direct modulation bandwidth of 37 GHz could be obtained.